| 15kv | 20kv | 30kv | Semi-HiPressure | Hipressure |
 |  |  |  |  |
| DN40CF mounting flange | DN40CF mounting flange | DN40CF mounting flange | add-on for 15/20/30 REG RHEED Guns | add-on for 15/20/30 REG RHEED Guns |
| 340 µA max current (up to 1mA on request) | 250 µA max current (up to 1mA on request) | 170 µA max current (up to 1mA on request) | DN40CF mounting flange | DN40CF mounting flange |
| 242 mm length |  242 mm length | 318 mm length | factor 1000 pressure reduction | factor 200.000 pressure reduction |
| up to 15 kV energy | up to 20 kV energy | up to 30 kV energy | Beam alignment aperture | Beam alignment aperture |
| more info | more info | more info | more info | more info |
Technical Data:
| Energy Range | 7-15 kV |
| Max. Current | 340 µA (up to 1mA on request) |
| Beam Spot Size | <70 µm |
| Focus Lens | electrostatic |
| Deflection | magnetic X-Y Beam Rocking Beam Blanking |
| Mounting Flange | DN40CF |
| Bakeout Temp. | 200°C |
| Dimensions | length 242 mm |
Technical Data:
| Energy Range | 7-20kV |
| Max. Current | 250 µA (up to 1mA on request) |
| Beam Spot Size | <70 µm |
| Focus Lens | electrostatic |
| Deflection | magnetic X-Y Beam Rocking Beam Blanking |
| Mounting Flange | DN40CF |
| Bakeout Temp. | 200°C |
| Dimensions | length 242 mm |
Technical Data:
| Energy Range | 10-30kV |
| Max. Current | 170 µA (up to 1mA on request) |
| Beam Spot Size | <70 µm |
| Focus Lens | electrostatic |
| Deflection | magnetic X-Y Beam Rocking Beam Blanking |
| Mounting Flange | DN40CF |
| Bakeout Temp. | 200°C |
| Dimensions | length 318 mm |
Technical Data:
| Pressure reduction through single differential pumping | Factor 1000 |
| Stable emission with add-on at chamber pressure | 1x10-4 mBar |
| Beam alignment through aperture in phosphor coated disk | |
| Deflection | magnetic X-Y Beam Rocking |
| Mounting Flange | DN40CF |
| Bakeout Temp. | 200°C |
| Dimensions (total length of add-on including gate valve) | 335 mm |
Technical Data:
| Pressure reduction through dual differential pumping | Factor 200.000 |
| Stable emission with add-on at chamber pressure | 5x10-2 mBar |
| Beam alignment through aperture in phosphor coated disk | |
| Deflection | magnetic X-Y Beam Rocking |
| Mounting Flange | DN40CF |
| Bakeout Temp. | 200°C |
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